| Description |
Characterization |
| Hitachi H-800 Scanning Transmission Electron Microscope |
Microstructure, Nanoparticle Size, Film Thickness |
| Hitachi S-800 Field Emission Scanning Electron Microscope with Oxford Inca EDS |
Microstructure, Elemental Analysis, Thickness |
| Siemens General Area Detector Diffraction System |
Crystallinity, Orientation, Pole Figure |
| Spectroscopic Ellipsometer |
Refractive Index and Thickness |
| Contact and Optical Profilometers |
Surface Topography and Thickness |
| Spectrometers (UV - infrared) |
Transmittance, Reflectance, and Absorbance |
| X-ray Fluorescence Spectrometer |
Composition |
| Leitz Optical Microscope (2000 X) |
Transmission/Reflective Appearance |
| Inductively Coupled Plasma-Mass Spectrometer |
Bulk and Trace Metals Analysis |
| Differential Scanning Calorimeter |
Heat Flow Analysis |
| Thermogravimetric Analyzer |
Thermal Weight Change |
| Pull Tester |
Adhesion |
| Solartron HF Frequency Response Analyzer |
Frequency Response |
| Hall Effect |
Charge Carrier Mobility |
| Electrical Test Station that includes Four Point Probe, HP4285a Precision LCR Meter, HP4140B pA Meter, and Keithley 2400 Digital Source Meter with Probe Positioner, HP Network Analyzer to 3 GHz with computer data acquisition |
Electrical Properties |
| Contact Angle Measuring System |
Surface Properties |
| Bipotentiostat with Rotating Disk Electrodes (Pine) |
Electrochemical Properties |
| Solartron Electrochemical Interface SI 1287 |
Electrochemical Properties |
| MOCON OX-TRAN 2/60 |
Oxygen Permeability |
| Mettler-Toledo Microbalance (2 µg sensitivity to 22 g) |
Weight |
| Bemco Salt Water Corrosion Test Chamber |
Corrosion |
nGimat has also acquired processing equipment, including: RCA substrate cleaning equipment, a CEE 100CB spin coater with an automatic photoresist dispensing system, a Karl Suss MJB-3 mask aligner, a Leitz optical microscope, developing baths, wet-etch baths, a multi-source e-beam evaporator, a plasma asher, and a dicing saw. In addition, nGimat has established a strong working relationship with the Georgia Tech Microelectronics Research Center, which has a full CMOS transistor development line.